The Client
In 2005, STMicroelectronics Pte Ltd awarded Veolia Water Solutions & Technologies (Veolia) the project to build the UPW plant AMK6E (loop 5) in Singapore with a production capacity of 160m³/hr.
STMicroelectronics is a global leader in developing and delivering System-on-Chip (soc) and semiconductor solutions across the spectrum of microelectronics.
Being the world's Top Ten semiconductor suppliers since 1999, ST Microelectronics has leading-edge manufacturing facilities on 4 continents, of which one 200mm wafer fab in Singapore.
The Client’s Needs
In order to answer the growing demand of the semiconductors industry, STMicroelectronics Pte Ltd was looking for a reliable Ultra Pure Water (UPW) supplier able to complete a very fast track project (4 months from award to water certification) and capable to provide high purified water respecting the technical specifications required for a 200mm wafer fab.
Veolia Solution
To reach the TOC and Resistivity criteria, the raw water is treated in the Primary Make-Up system by combining the latest technologies: UV, Membrane Degazifier and Continuous De-ionization.
The Continuous De-ionization (CEDI) process produces a consistent water quality with a high percentage of feed water ion removal. CEDI systems operate without the use of chemicals, 24 hours a day and 7 days a week. There is regeneration requirement in CEDI and hence no downtime.
Ultrafiltration membranes are used in the Polishing loop to guarantee continuous high quality water at the point of use.
Intelligent engineering design allows us to incorporate the new systems into existing plant without any shutdown.
Results
- By combining advanced technologies, Veolia offered cost-effective solution and ensured high purified water production (TOC<1ppb, Resistivity to 18.2 mega ohm, Boron<5ppt, Silica<0.5ppb, particle 0.05M<300c/l).
- Constant high purity water is provided to STMicroelectronics Pte Ltd at the point of use to ensure the quality of the semi-conductors production process.
- By using SCADA PLC, the plant is controlled at the touch of a button 24/7.